Semiconductor compressed air classification
The semiconductor industry has extremely high requirements for compressed air, and its compressed air is usually classified according to its purity, dryness, oil content and other indicators. The grade classification of semiconductor compressed air is generally as follows:
| Grade (non-hydrating) content | Water content | Oil content | Scope of application | ||
|---|---|---|---|---|---|
| Always full-level | ≥99.995% | ≤5mg/m³ | ≤0.003mg/m³ | Applicable to the most sensitive links in semiconductor production, such as lithography machines, scanning electron microscopes and other high-tech manufacturing equipment. | |
| Ultra-clean | ≥99.99% | ≤10mg/m³ | ≤0.01mg/m³ | is suitable for various links in semiconductor production, such as wet process, wafer cleaning, etc. | |
| Private level | ≥99.9% | ≤20mg/m³ | ≤0.1mg/m³ | is suitable for most links in semiconductor production, such as chemical vapor deposition, dry process, etc. | |
| Clean level | ≥99.5% | ≤50mg/m³ | ≤0.5mg/m³ | is suitable for some semiconductor production links, such as oxidation furnaces, annealing furnaces, etc. | |
| Protection level | ≥98% | ≤100mg/m³ | ≤1mg/m³ | is suitable for non-critical links in semiconductor production, such as testing equipment, auxiliary equipment, etc. | |
| Industrial grade | ≥95% | ≤500mg/m³ | ≤5mg/m³ | is suitable for equipment other than semiconductor production, such as ordinary mechanical equipment, factory compressed air, etc. | |
| Atmospheric level | ≥90% | ≤1000mg/m³ | ≤10mg/m³ | is suitable for some more general equipment, such as oil drilling and production, some fully enclosed thermostats, etc. |
These hierarchical categories are designed to meet the strict requirements for compressed air quality in different semiconductor production processes. In actual production, the higher the level of compressed air, the higher the production cost. Therefore, while ensuring process quality, low-grade compressed air should be used as much as possible to reduce production costs. Semiconductor compressed air grade standards play a crucial role in semiconductor production and play an important role in ensuring the stability of the production process and improving product quality.
