Semiconductor compressed air quality standards
The semiconductor compressed air quality standards mainly include the following aspects:
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Compressed air quality level: According to ISO 8573.1, pollutants in compressed air are divided into solid impurities, water and oil. The semiconductor industry usually requires a high air quality rating to ensure the stability of the production process and the quality of the product. Specifically, dust-containing requirements usually reach 0.01 μm, which means that the solid particles in compressed air should be smaller than this value.
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Oil content requirements: In the semiconductor industry, the oil content in compressed air is strictly controlled. Typically, the oil content requirement is 0.00ppm, which means that the compressed air is basically free of oil to avoid contamination of the production process and products.
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Dew point requirements: Dew point temperature is an important indicator to measure the moisture content in compressed air. The semiconductor industry usually requires very low dew point requirements for compressed air to ensure that the air is free of excessive moisture. Generally speaking, the dew point is required to be between -40°C and -70°C, which helps prevent moisture from interfering with the production process.
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Pressure Requirements: The semiconductor industry also has certain requirements for the pressure of compressed air. Although the specific pressure values may vary from process to equipment, generally speaking, the pressure should be kept within a stable range to ensure the smooth progress of the production process.
To sum up, semiconductor compressed air quality standards are a comprehensive and multi-faceted consideration, including solid impurities, moisture, oil and pressure. These standards are designed to ensure the stability of the semiconductor production process and the quality of the product.
