What is the purity of compressed air commonly used in the semiconductor industry
In the field of semiconductor manufacturing, the cleanliness of compressed air directly affects chip production quality and equipment stability. The industry usually requires compressed air to meet extremely high purity standards to avoid interference with precision processes by tiny impurities.
Granklin water-lubricated single-screw air compressor outputs air through physical compression. Its core advantage lies in its oil-free design-pure water is used to replace traditional lubricating oil, eliminating oil residue from the source, and meeting the requirements of semiconductor technology for “zero oil pollution”. Basic requirements. However, the original compressed air may still contain naturally condensed moisture and fine particles in the air, which needs to be further purified through post-treatment equipment.
The purity standards for compressed air commonly used in the semiconductor industry usually include: the dew point temperature needs to be controlled below-40℃ (to ensure deep drying), and the particulate matter content needs to reach Level 1 or better in the ISO 8573-1 standard (particle size ≤0.1μm The concentration of particulate matter is extremely low), and the oil content needs to be strictly zero. The oil-free air output by Granklin air compressor can provide a clean foundation for post-treatment equipment. By installing a cold dryer, a dry dryer and a precision filter, residual moisture and particulate matter can be effectively removed, ensuring that the final gas conforms to the strict requirements of the semiconductor process.
The advantages of this solution are that the oil-free characteristics of Granklin air compressor avoid pollution of the drying equipment and filtration system by oil pollution, and extend the service life of the post-treatment components; at the same time, the stable compressed air flow and pressure characteristics provide for the post-treatment equipment. Efficient operation provides guarantee and reduces the risk of unstable purification effect caused by air pressure fluctuations.
It is recommended that semiconductor companies comprehensively evaluate the purification plan based on the gas consumption, continuity requirements and environmental humidity of specific processes: in scenarios with high humidity or extremely high requirements for dryness, the combination of dry cleaners and multi-stage filtration is preferred; If the environmental humidity is controllable and the process tolerance is high, the combination of cold dryers and precision filters can also be an economical choice. The combination of Granklin air compressors and post-processing equipment provides the semiconductor industry with reliable gas solutions that meet precision manufacturing standards.
