
Industrial gas source cleanliness requirements
In the field of industrial production, air source cleanliness is a core factor in ensuring product quality, production safety and stable operation of equipment. The following systematically describes the key requirements for industrial gas source cleanliness from four dimensions: technical standards, industry applications, implementation paths and operation and maintenance management:
1. Cleanliness technical standard system
The ISO 14644 standard formulated by the International Organization for Standardization (ISO) divides the air cleanliness of clean rooms into 9 levels (ISO levels 1-9), using the number of particles of different particle sizes per cubic meter of air as a quantitative indicator. For example:
- ISO Level 1: Allow ≤10 particles with a diameter ≥0.1μm, suitable for precision fields such as semiconductor chip manufacturing.
- ISO Class 5: ≤100 particles with a diameter ≥0.5μm are allowed, which is the benchmark standard for the production of sterile preparations in the pharmaceutical industry.
- ISO Class 8: ≤3,520,000 particles with a diameter ≥0.5μm are allowed, which are common in general electronic assembly workshops.
The domestic standard GB/T 16292-2010 adopts a similar grading system, but some industries have special specifications. For example, the food industry requires the oil content of compressed air to be ≤0.01mg/m³, and the microbial indicators must meet the GB 4789.2-2016 Food Microbiological Inspection standards.
2. The core impact of cleanliness on industrial production
- product quality assurance
- In semiconductor manufacturing, particles with a diameter of ≥0.1μm may cause short circuits in integrated circuits and reduce yields.
- If the production of sterile preparations in the pharmaceutical industry is exposed to environments below ISO level 5, the risk of microbial contamination will increase.
- Equipment operating stability
- Precision instruments (such as mass spectrometers and laser cutting machines) require air source cleanliness to reach ISO 3-4. Particulate matter pollution will cause wear of optical lenses and increase maintenance costs.
- regulatory compliance
- Good Manufacturing Practice (GMP) clearly requires that the production of sterile drugs must be carried out in a Class A clean area in an ISO 5 background.
- Compressed air used in contact with food must comply with GB 4806.7-2016 National Food Safety Standards to avoid oil stains and odors contaminating products.
3. Path to achieve high cleanliness air source
- Air purification system design
- multi-stage filtration: Using three-stage filtration of primary effect (G4), intermediate effect (F8), and high efficiency (HEPA), the filtration efficiency of particulate matter with a diameter of ≥0.3μm reaches 99.97%.
- Air flow organization optimization: Ensure that clean air evenly covers the production area through vertical one-way flow or turbulent air flow patterns and avoid pollution in the vortex area.
- Environmental control system integration
- temperature and humidity control: Maintain the temperature of 18-26℃ and the humidity of 45%-65% to inhibit microbial reproduction and static electricity generation.
- Pressure gradient management: The clean room needs to maintain a positive pressure of ≥10Pa to prevent the intrusion of external polluted air.
- Special process guarantee
- nitrogen protection: In the production of easily oxidizable products, a nitrogen environment with a purity of ≥99.999% is provided through liquid nitrogen vaporization.
- oil mist separator: Use a coalescing filter to control the oil content of the compressed air below 0.001mg/m³.
4. Cleanliness maintenance and verification system
- daily monitoring
- particle count: Use a laser particle counter to regularly detect critical control points in accordance with ISO 14644-1 requirements.
- microbiological monitoring: Measure the concentration of microorganisms in the air through a plankton sampler (such as the Anderson impactor sampler).
- filter management
- differential pressure alarm: When the filter pressure difference exceeds 150% of the initial value, the replacement process needs to be started.
- integrity test: Use the DOP/PAO aerosol method to verify that the HEPA filter leakage rate is ≤0.01%.
- Personnel and material control
- gowning procedure: Operators need to go through the air shower to remove dust and wear one-piece cleaning clothes, gloves and masks.
- material purification: Through the transfer window or airlock, clean and disinfect the external packaging before entering the clean area.
- Incident Response Service Mechanism
- Handling of uncontrolled differential pressure: If the pressure difference in the clean room is less than 5Pa, the backup fan needs to be started immediately and the leak point should be checked.
- Disposal of excessive particulate matter: Pause production, start deep cleaning procedures, and conduct environmental verification again.
5. Comparison of cleanliness requirements in typical industries
industry | Key control indicators | Typical cleanliness levels | risk cases |
---|---|---|---|
semiconductor manufacturing | Particulate matter ≤ 1/ft ³ (0.1 μ m), metal ions ≤ 1 ppb | ISO 3 – 4 | A wafer factory suffered abnormal photoresist adhesion due to oil in compressed air, resulting in a single batch loss of more than US$2 million. |
Pharmaceutical sterile preparation | Floating bacteria ≤ 1CFU/m ³, settling bacteria ≤ 1CFU/dish | ISO Level 5 (Level A Region) | A pharmaceutical company caused microbial contamination of freeze-dried powder needles due to the loss of control of pressure difference in the clean room, and the product recall rate reached 12%. |
food packaging | Oil content ≤0.01mg/m³, dew point ≤-20℃ | ISO 7-8 | In a beverage factory, the production line was shut down for 48 hours due to moisture in compressed air, causing mold in the PET preform. |
precision machining | Particulate matter ≤100/m³ (0.5μm), humidity ≤45%RH | ISO 6-7 | A bearing factory caused the surface of the spindle to be scratched due to dust in the air source, and the product repair rate increased by 8%. |
Through strict technical standard implementation, systematic environmental control and standardized operation and maintenance management, the cleanliness of industrial gas sources can be ensured to meet high-precision manufacturing needs and provide basic guarantee for product quality and production safety.