Compressed air supply in semiconductor factories

In semiconductor factories, the supply of compressed air is a crucial link, which is directly related to the smooth progress of the production process, the improvement of product quality and the improvement of production efficiency. The following is a detailed explanation of the supply of compressed air in semiconductor factories: 1. The role of compressed air in semiconductor factories

1. Power source:
   • Compressed air provides power to various pneumatic equipment in semiconductor factories, such as pneumatic motors, cylinders, etc., which are used to drive silicon wafer cutting, grinding, polishing and other processes.
2. Cleaning and Purge:
   • In the semiconductor production process, compressed air is used to purify particles and dust on the surface and inside of the equipment to ensure the cleanliness of the production environment.
   • In the process of silicon wafer processing, compressed air is also used to dry and clean the silicon wafer.
3. Control System:
   • By adjusting the pressure and flow of compressed air, precise control of various parameters of semiconductor production equipment can be achieved, and production efficiency and product quality can be improved.

2. Semiconductor factory compressed air supply system

1. Main components:
   • Air compressor: Responsible for compressing air in the atmosphere to a high pressure state and providing a stable compressed air source for the system. Semiconductor factories usually use lubricant-free air compressors to avoid oil pollution from contaminating products.
   • Air Storage Tank: Used to store compressed air to ensure continuous supply during peak demand.
   • Filter device: includes air filters and process filters, etc., which are used to remove impurities, particles, moisture and oil from the air, ensuring that the compressed air entering the production process is pure and pollution-free.
   • Pipe Network: Transfer compressed air from the compressor to each production link to ensure the stable supply and efficient use of compressed air.
   • Control valve: Can accurately control the flow rate and pressure of compressed air to meet the needs of different production links.
2. Compressed air quality requirements:
   • Semiconductor factories have extremely high requirements for the quality of compressed air and must meet the standards of oil-free, water-free, and particulate-free.
   • According to international standardsISO 8573-1:2010 The mass of compressed air is classified according to the content of three pollutants: moisture, oil and particulate matter. For semiconductor factories, it is usually required that all pollutants must be Class 0.
3. Energy Efficiency and Cost Control:
   • In view of the energy consumption of semiconductor plants, the energy efficiency of compressed air supply systems is crucial to controlling operating costs.
   • By using advanced compressed air technology and equipment, such as frequency converter air compressors, high-efficiency filter devices, etc., energy utilization efficiency can be improved and production costs can be reduced.

3. Maintenance and management of compressed air supply in semiconductor factories

1. Regular maintenance:
   • Semiconductor factories need to regularly maintain and maintain the compressed air supply system, including checking the sealing of the pipeline, cleaning the filter device, calibration control valves, etc.
2. Quality Monitoring:
   • Continuously monitor the quality of the gas by setting CQC to ensure the purity and stability of the compressed air.
3. Emergency Plan:
   • Semiconductor factories should establish complete emergency plans to deal with possible system failures or emergencies and ensure the smooth progress of the production process.

IV. Case analysis of compressed air supply in semiconductor factories

Take a semiconductor factory as an example, the factory adopts advanced compressed air supply systems, including multiple oil-free screw compressors, adsorption dryers, high-efficiency filter devices and intelligent control systems. The system can ensure the purity and stability of compressed air and meet the high standards of semiconductor production. At the same time, by adopting inverter air compressors and optimizing pipeline design, the system has also achieved significant energy saving effects and reduced production costs.

In general, the supply of compressed air in semiconductor factories is a complex and important link. Through reasonable design, efficient operation and careful maintenance and management, the smooth progress of semiconductor production and product quality can be ensured.